A molecular dynamics study of ion beam assisted deposition of thin molybdenum films and analysis by thermal desorption spectrometry

Master thesis (1998)

Authors

Contributors

B.J. Thijsse (mentor)
L.D. Van Ee (mentor)
Department
Technische Materiaalwetenschappen (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 1998 Peter Klaver
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Published Date

30-04-1998

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Technische Materiaalwetenschappen