Resonant Air Quality Sensor

In this Thesis report the modeling, design, simulation, fabrication and measurements done at the Resonant Air Quality Sensor is described. The sensor is based on a resonant system, made in a silicon wafer with MEMS technology. By depositing the particles to be measured on top of the mass, the total mass of these particles can be measured by...

Design of a MEMS micro-resistojet

Silicon MEMS Micro-Evaporator