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Conference paper (1)
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Titanium nitride for MEMS hotplates
Conference paper (2004) -
Fredrik Creemer (author)
,
P. M. Sarro (author)
,
M Laros (author)
,
H Schellevis (author)
,
T Nathoeni (author)
,
LA Steenweg (author)
,
V. Svechnikov (author)
,
H. Zandbergen (author)
