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NB Koster
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5 records found
Parallel scanning probe microscope comes of age
Abstract -
H. Sadeghian Marnani
,
TC van den Dool
,
WE Crowcombe
,
RW Herfst
,
J Winters
,
GFIJ Kramer
,
NB Koster
Fabrication and analysis of Exteme Ultra-violet reflection masks with patterned W/C absorber bilayers
Journal article -
HJ Voorma
,
E Louis
,
J Friedrich
,
NB Koster
,
LA Smaenok
,
F Bijkerk
,
T Zijlstra
,
LEM de Groot
,
E.W.J.M. van der Drift
,
BAC Rousseeuw
,
J Romijn
Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems
Journal article -
RW Herfst
,
W Klop
,
M Eschen
,
TC van den Dool
,
NB Koster
,
H. Sadeghian Marnani
Parallel, miniaturized scanning probe microscope for defect inspection and review
Conference paper -
H. Sadeghian Marnani
,
TC van den Dool
,
WE Crowcombe
,
RW Herfst
,
J Winters
,
GFIJ Kramer
,
NB Koster
Extreme UV Lithography: Development of a laser plasma source and multilayer reflective optics
Journal article -
F Bijkerk
,
LA Shmaenol
,
T Zijlstra
,
E Louis
,
HJ Voorma
,
NB Koster
,
FA van Goor
,
J van Spijker
,
E.W.J.M. van der Drift
,
J Romijn
,
BAC Rousseeuw