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R Li
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2 records found
Continuous deep reactive ion etching of tapered via holes for three-dimensional integration
Journal article -
R Li
,
Y Lamy
,
WFA Besling
,
F Roozeboom
,
Pasqualina M Sarro
Fabrication of Stretchable PDMS Membrane as Substrate Material for Multi-Electrode Array Devices
Conference paper -
R Li
,
A. van den Bogaard
,
R. Dekker