HJ Voorma | TU Delft Repository

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HJ Voorma

Doctoral thesis (1)

Journal article (2)

3 records found

1

Fabrication and analysis of Exteme Ultra-violet reflection masks with patterned W/C absorber bilayers

Journal article (1997) - HJ Voorma (author) , E Louis (author) , J Friedrich (author) , NB Koster (author) , LA Smaenok (author) , F. Bijkerk (author) , T Zijlstra (author) , LEM de Groot (author) , EWJM van der Drift (author) , BAC Rousseeuw (author) , J Romijn (author)

Mo/Si multilayer optics for micro-lithography

Doctoral thesis (1997) - HJ Voorma (author) , S Radelaar (promotor) , MJ van der Wiel (copromotor)

Extreme UV Lithography: Development of a laser plasma source and multilayer reflective optics

Journal article (1996) - F Bijkerk (author) , LA Shmaenol (author) , T Zijlstra (author) , E Louis (author) , HJ Voorma (author) , NB Koster (author) , FA van Goor (author) , J van Spijker (author) , E.W.J.M. van der Drift (author) , J Romijn (author) , BAC Rousseeuw (author)