Multi-Scale modeling of chemical vapor deposition processes for thin film technology

Some recent developments in chemical vapor deposition process and equipment modelling.

Simulation of selective tungsten chemical vapour deposition (a section of Solid State Electronics)

Transient Simulations of selective Chemical Vapour Deposition of Tungsten using Phoenics-CVD

Modeling of selective tungsten LPCVD

Design and scale-up of chemical vapour deposition reactors for semiconductor processing

Modeling of blanket and selective tungsten LPCVD

Detailed modeling of chemistry and transport phenomena in CVD reactors