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A Bourtsev
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4 records found
Near-ideal implanted shallow-junction diode formation by excimer laser annealing
Conference paper -
V Gonda
,
A Bourtsev
,
T.L.M. Scholtes
,
L.K. Nanver
Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes
Journal article -
A Bourtsev
,
H. Schut
,
L.K. Nanver
,
A van Veen
,
J Slabbekoorn
,
T.L.M. Scholtes
Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes
Journal article -
A Bourtsev
,
H. Schut
,
L.K. Nanver
,
A van Veen
,
J Slabbekoorn
,
T.L.M. Scholtes
Surface roughness of contact windows for shallow junction formation
Conference paper -
V Gonda
,
A Bourtsev
,
T.L.M. Scholtes
,
L.K. Nanver