S. Steenbrink | TU Delft Repository

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S. Steenbrink

Journal article (6)

6 records found

1

Shot noise in electron-beam lithography and line-width measurements

Journal article (2006) - P. Kruit (author), S. Steenbrink (author)

Predicted effect of shot noise on contact hole dimension in e-beam lithography

Journal article (2006) - P. Kruit (author), S. Steenbrink (author), M.J.J. Wieland (author)

Shot noise in electron beam lithography and line width measurements

Journal article (2005) - P. Kruit (author), S. Steenbrink (author)

Fabrication and characterization of p-type silicon field-emitter arrays for lithography

Journal article (2005) - TF Teepen (author), H van 't Spijker (author), S. Steenbrink (author), A van Zuuk (author), C.T.H. Heerkens (author), N van Druten (author), M Wieland (author), P. Kruit (author)

Local critical dimension variation from shot-noise related line edge roughness

Journal article (2005) - P. Kruit (author), S. Steenbrink (author)

Optimum dose for shot noise limited CD uniformity in E-beam lithography

Journal article (2004) - P. Kruit (author), S. Steenbrink (author), R. Jager (author), MJJ Wieland (author)