JE
J.D. Ellis
Authored
20 records found
Two different measure- and-correct algorithms, the Chu-Ray algorithm and the Eom algorithm, were simulated to estimate their effectiveness for correcting periodic nonlinearity applied a simulated wafer positioning system. Both algorithms, which demonstrated no periodic nonlineari
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Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exa
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Displacement interferometers are widely used in precision engineering and metrology applications. For multi-axis systems, free space delivery of the optical beams requires high tolerance pointing stability and couples the source to the interferometer location. Fiber delivery is d
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Heterodyne interferometry is a widely applied technique for length and displacement measurements in precision systems. Free-space optical beam delivery couples the source directly to the interferometer location. Conversely, fiber delivery is desired to decouple the source and int
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