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PA Stolk
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Laser annealing for ultra-shallow junction formation in advanced CMOS
Conference paper -
R. Surdeanu
,
YV Ponomarev
,
MJP Hopstaken
,
JGM van Berkum
,
F Roozeboom
,
R Lindsay
,
R Cerutti
,
BJ Pawlak
,
L.K. Nanver
,
I Hoflijk
,
PA Stolk
,
CJJ Dachs
,
MA Verheijen
,
M Kaiser