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Comparative study of Cl-2, Cl-2/O-2, and Cl-2/N-2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Journal article (2008) - CF Carlstrom, R van der Heijden, MSP Andriesse, F Karouta, RW van der Heijden, E.W.J.M. van der Drift, H.W.M. Salemink

Journal article (2006) - C.G.C.H.M Fabrie, JT Kohlhepp, HJM Swagten, B Koopmans, MSP Andriesse

Conference paper (2004) - RW van der Heijden, CF Carlström, MSP Andriesse, E.W.J.M. van der Drift, EJ Geluk, F Karouta, P Nouwens, YS Oei, T de Vries, H.W.M. Salemink

Conference paper (2004) - RW van der Heijden, MSP Andriesse, CF Carlström, E.W.J.M. van der Drift, EJ Geluk, F Karouta, P Nouwens, YS Oei, T de Vries, H.W.M. Salemink

Journal article (2001) - MSP Andriesse, E.W.J.M. van der Drift, W.G. Sloof

Report (2001) - MSP Andriesse, E.W.J.M. van der Drift

Report (2001) - MSP Andriesse, E.W.J.M. van der Drift

Journal article (2000) - MSP Andriesse, T Zijlstra, E.W.J.M. van der Drift

Conference paper (2000) - MSP Andriesse, T Zijlstra, E.W.J.M. van der Drift

Report (2000) - MSP Andriesse, T Zijlstra, E.W.J.M. van der Drift

Conference paper (1999) - RG van Veen, A.H. Verbruggen, F Kuper, MSP Andriesse, E.W.J.M. van der Drift, S Radelaar, S Anders, HM Jaeger, Z Wang, P Tanner, C Salm, T Mouthaan

Report (1999) - MSP Andriesse, E.W.J.M. van der Drift