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JGM van Berkum

Book chapter (1)

Conference paper (1)

Journal article (1)

3 records found

1

Laser annealing for ultra-shallow junction formation in advanced CMOS

Conference paper (2002) - R Surdeanu (author) , YV Ponomarev (author) , MJP Hopstaken (author) , JGM van Berkum (author) , F Roozeboom (author) , R Lindsay (author) , R Cerutti (author) , BJ Pawlak (author) , L. K. Nanver (author) , I Hoflijk (author) , PA Stolk (author) , CJJ Dachs (author) , MA Verheijen (author) , M. Kaiser (author)

Diffraction-line Broadening analysis of Strain Fields in Crystalline Solids.

Book chapter (2000) - JGM van Berkum (author) , R Delhez (author) , Th.H de Keijser (author) , EJ Mittemeijer (author)

Note on relaxation of cooling induced strains in two-phase AlSi-alloys at room temperature

Journal article (1991) - JGM van Berkum (author) , R. Delhez (author) , Th.H de Keijser (author) , EJ Mittemeijer (author) , P. van Mourik (author)