Electron optics of skewed micro-Einzel lenses

Multibeam Electron Source using MEMS Electron Optical Components

Multi Beam electron source for nanofabrication using electron beam induced deposition

Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

Aberration model of a multi beam scanning microscope for electron beam-induced deposition

Development of a multi electron beam source for sub-10 nm electron beam induced deposition

Design Approach for a Multi Beam Electron Beam Induced Deposition System

Multibeam electron source for nanofrabrication and multibeam imaging

Electron beam induced deposition and in-situ inspection of sub-10 nm structures

Electron microlenses and microlens arrays