9 records found
1
Annealing experiments on supercritical Si1-xGex layers grown by RPCVD
Electrical and physical properties of polysilicon film resistors modified by excimer laser annealing
Defect related photoluminescence of SiGe/Si heterostructures grown by APCVD
Annealing experiments on supercritical Si1-xGEx layers grown by RPCVD
The influence of growth kinetics on the relaxation of epitaxially grown RPCVD SI1-x GEx
Defects analysis in Si/Si0.7Ge0.3 heterostructures deposited by APCVD [niet eerder opgevoerd]
The uniformity of APCVD SiGe layers with high Ge concentration
The influence of growth kinetics on the relaxation of epitaxially grown RPCVD Si1-xGex