20 records found
1
Substrate effects in Monolithic RF transformers on silicon
Through-wafer copper electroplating for RF silicon technology
Substrate options and add-on process modules for monolithic RF silicon technology
Through-silicon-chip transmission lines
Ground pattern for improved characteristics of spiral RF transformers on silicon
IC-compatible two-level bulk micromachining process module for RF silicon technology
Design and optimization of monolithic RF transformers on silicon
Optimized geometrical features of monolithic spiral RF transformers on silicon
Integrated RF passive components - discrete vs distributed
A micromachining post-process module with pattern transfer in deep cavities for RF silicon technology
A novel micromachining process using pattern transfer over large topography for RF silicon technology
Characterization of a bulk-micromachined post-process module for silicon RF technology
A micromachining post-process module for RF silicon technology
IC-compatible two-level bulk micromachining for RF silicon technology
Integrated transmission lines on high-resistivity sillicon: coplanar waveguides or microstrips
Analysis of generic spiral-coil RF tranformers on silicon
A sub-surface metallization post-process IC module for RF technology
Performance of generic monolithic spiral-coil RF transformer
Design and characterization of passive RF structures on reduced-thicknness conductor-backed substrates
IC-compatible two-level bulk micromachining for RF components
