MJJ Wieland | TU Delft Repository

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MJJ Wieland

Conference paper (4)

Journal article (5)

9 records found

1

Optimum dose for shot noise limited CD uniformity in E-beam lithography

Journal article (2004) - Pieter Kruit (author) , S. Steenbrink (author) , R Jager (author) , MJJ Wieland (author)

Fabrication and characterization of silicon carbide field-emitter array

Journal article (2004) - A van Zuuk (author) , C.Th.H. Heerkens (author) , AHV van Veen (author) , T.F. Teepen (author) , MJJ Wieland (author) , O. Groening (author) , P Kruit (author)

Field Emission Photocathode Arrray for multibeam electron lithography.

Journal article (2001) - MJJ Wieland (author) , BJ Kampherbeek (author) , P Addessi (author) , Pieter Kruit (author)

Field emission photocathode array for high throughput lithography.

Conference paper (2001) - AHV van Veen (author) , BJ Kampherbeek (author) , MJJ Wieland (author) , Pieter Kruit (author)

An experimental setup to test the MAPPER electron lithography concept.

Journal article (2000) - BJ Kampherbeek (author) , MJJ Wieland (author) , A. Zuuk (author) , P Kruit (author)

Resolution of the multiple aperture pixel by pixel enhancement of resolution electron lithography concept.

Journal article (2000) - BJ Kampherbeek (author) , MJJ Wieland (author) , P. Kruit (author)

An experimental setup to prove the MAPPER electron lithography concept.

Conference paper (1999) - BJ Kampherbeek (author) , MJJ Wieland (author) , P. Kruit (author)

An experimental setup to test the Mapper electron lithography concept.

Conference paper (1999) - BJ Kampherbeek (author) , MJJ Wieland (author) , A. Zuuk (author) , P Kruit (author)

An experimental setup to proof the MAPPER electron lithography concept.

Conference paper (1999) - BJ Kampherbeek (author) , MJJ Wieland (author) , P. Kruit (author)