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KB Jinesh

Conference paper (1)

1 records found

1

Oxidized ALD-deposited titanium nitride films as a low-temperature alternative for enhancing the wettability of through-silicon vias

Conference paper (2009) - M Saadaoui (author) , Henk W. van Zeijl (author) , Lina Sarro (author) , TMH Pham (author) , HC MKnoops (author) , WMM Kessels (author) , MCM van de Sanden (author) , F Roozeboom (author) , Y Lamy (author) , KB Jinesh (author) , W. Besling (author)