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DG
D Gruber
1 records found
1
Authored
Fast etching of molding compound by an Ar/O2/CF4 plasma and process improvements for semiconductor package decapsulation
Journal article (2012) -
J. Tang
,
D Gruber
,
JBJ Schelen
,
H-J Funke
,
C.I.M. Beenakker
