7 records found
1
Double laser annealing of implanted silicon by using laser pulse offsets
Silicon laser annealing by a two-pulse laser system with variable pulse offsets
Characterization of waferstepper and process related front- to backwafer overlay errors in bulk micro machining using electrical overlay test structures
Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes
Characterization of front to backwafer bulk micromachining using electrical overlay test structures
Silicon Drift Detectors for the Detection of X-rays and gamma-rays