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M.

5 records found

Authored

The application of Moiré effect for testing of a lithographic projection lens is reported. The arrangement presented allows measuring magnification, distortion, field curvature and telecentricity of the lens and can be used for its fine tuning. The method is based on two matched ...

We describe an approach that offers an almost real time image enhancement through turbulent and wavy media. The approach consists in a combination of optimization-based adaptive optics with digital multi-frame v-post-processing. Applications in astronomical and terrestrial ima ...

Contributed

The packaging of a microchip affects its size, performance and cost. With advanced packaging, more efficient and smaller microchips can be produced. For this, advanced packaging stepper systems are used, which are lithography machines with a highly optimized projection lens syste ...