The application of Moiré effect for testing of a lithographic projection lens is reported. The arrangement presented allows measuring magnification, distortion, field curvature and telecentricity of the lens and can be used for its fine tuning. The method is based on two matched two-dimensional gratings, positioned in mutually conjugated planes; one of them can be translated. Visual interpretation of Moiré fringe pattern allows quick diagnostics of position errors exceeding critical dimension, whereas lateral scanning is applied for measuring of smaller magnitude errors. Field curvature and telecentricity are measured by 3D scanning. Presented results are in a good agreement with those obtained elsewhere.

We describe an approach that offers an almost real time image enhancement through turbulent and wavy media. The approach consists in a combination of optimization-based adaptive optics with digital multi-frame v-post-processing. Applications in astronomical and terrestrial imaging - where the image features are initially unresolved due to loss of contrast, blur, vibrations and image wander - have been illustrated by experimental results. A new software from Flexible Optical BV is presented which extends the capabilities of modern imaging systems, in combination with adaptive optics, or standalone.