Person | TU Delft Repository

Thermal budget considerations for excimer laser annealing of implanted dopants

Journal article - V Gonda, J Venturini, C Sabatier, J. van der Cingel, L.K. Nanver

Simulation and Experimental study of crystallographic orientation control of 2D location controlled single grain crystalline silicon

Conference paper - M.R. Tajari Mofrad, R. Ishihara, J Derakhshandeh, A Baiano, J. van der Cingel, C.I.M. Beenakker

Thermal budget considerations for excimer laser annealing of implanted dopants

Conference paper - V Gonda, J Venturini, C Sabatier, J. van der Cingel, L.K. Nanver

N-channel MOSFETS fabricated on self assembled SiGe dots for strain-enhanced moblity

Conference paper - V. Jovanovic, C Biasotto, G Mussler, J Stangl, G Bauer, J. van der Cingel, E Bonera, L.K. Nanver, J Moers, D Grutzmacher, J. Zhang, OG Schmidt, L Miglio, H Kosina, A Marzegalli, G Vastola

A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

Conference paper - J. Derakhshandeh Kheljani, M.R. Tajari Mofrad, R. Ishihara, J. van der Cingel, C.I.M. Beenakker

Integrating carbon nanotubes as vias in a monolithic 3DIC process

Conference paper - S. Vollebregt, R. Ishihara, AN Chiaramonti, J. van der Cingel, C.I.M. Beenakker

Excimer laser crystallization of thick a-Si for photodiode and solar cell applications

Poster - M.R. Tajari Mofrad, K Huet, C Boniface, R. Ishihara, J. Derakhshandeh Kheljani, J. van der Cingel, J Venturini, C.I.M. Beenakker

Formation of location-controlled germanium grains by excimer laser

Conference paper - A Baiano, R. Ishihara, J. van der Cingel, C.I.M. Beenakker

Stacking of Single-Grain Thin-Film Transistors

Journal article - M.R. Tajari Mofrad, J Derakhshandeh, R. Ishihara, A Baiano, J. van der Cingel, C.I.M. Beenakker

Integrated High Performance (100) and (110) Oriented Single-Grain Si TFTs without Seed Substrate

Conference paper - T Chen, R. Ishihara, J. van der Cingel, A Baiano, M.R. Tajari Mofrad, H. Schellevis, C.I.M. Beenakker

Low-temperature bottom-up integration of carbon nanotubes for vertical interconnects in monolithic 3D integrated circuits

Conference paper - S. Vollebregt, R. Ishihara, J. van der Cingel, C.I.M. Beenakker

Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation

Conference paper - C Biasotto, V Gonda, L.K. Nanver, J. van der Cingel, V. Jovanovic

n-Channel MOSFETs fabricated on SiGe dots for strain-enhanced mobility

Journal article - V. Jovanovic, C Biasotto, OG Schmidt, L Miglio, L.K. Nanver, J Moers, D Gruetzmacher, J Gerharz, G Mussler, J. van der Cingel, J. Zhang, G Bauer

Application of Laser Annealing in the EU FP6 Project D-DotFET

Conference paper - L.K. Nanver, V. Jovanovic, C Biasotto, J. van der Cingel

Strained single grain silicon n- and p- channel thin-film transistors by excimer laser

Journal article - A Baiano, R. Ishihara, J. van der Cingel, C.I.M. Beenakker

High performance single-grain Ge TFTs without seed substrate

Conference paper - T Chen, R. Ishihara, M.R. Tajari Mofrad, S. Vollebregt, J. van der Cingel, M. van der Zwan, C.I.M. Beenakker

Monolithic 3D integration of single-grain Si TFTs

Conference paper - M.R. Tajari Mofrad, R. Ishihara, J. Derakhshandeh Kheljani, A Baiano, J. van der Cingel, C.I.M. Beenakker

Application of amorphous boron layer as diffusion barrier for pure aluminium

Conference paper - A. Sakic, G. Lorito, F Sarubbi, T.L.M. Scholtes, J. van der Cingel, L.K. Nanver

Downscaling of Al/Si-gate MOSFETs with Self-Aligned Laser Annealed Source/Drain Junctions

Conference paper - C Biasotto, V. Jovanovic, L.K. Nanver, J. van der Cingel

Optimizing chemical mechanical polishing process in 3D-IC

Conference paper - J. Derakhshandeh Kheljani, M.R. Tajari Mofrad, R. Ishihara, C.I.M. Beenakker, J. van der Cingel

J. van der Cingel

Authored

Thermal budget considerations for excimer laser annealing of implanted dopants

Simulation and Experimental study of crystallographic orientation control of 2D location controlled single grain crystalline silicon

Thermal budget considerations for excimer laser annealing of implanted dopants

N-channel MOSFETS fabricated on self assembled SiGe dots for strain-enhanced moblity

A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

Integrating carbon nanotubes as vias in a monolithic 3DIC process

Excimer laser crystallization of thick a-Si for photodiode and solar cell applications

Formation of location-controlled germanium grains by excimer laser

Stacking of Single-Grain Thin-Film Transistors

Integrated High Performance (100) and (110) Oriented Single-Grain Si TFTs without Seed Substrate

Low-temperature bottom-up integration of carbon nanotubes for vertical interconnects in monolithic 3D integrated circuits

Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation

n-Channel MOSFETs fabricated on SiGe dots for strain-enhanced mobility

Application of Laser Annealing in the EU FP6 Project D-DotFET

Strained single grain silicon n- and p- channel thin-film transistors by excimer laser

High performance single-grain Ge TFTs without seed substrate

Monolithic 3D integration of single-grain Si TFTs

Application of amorphous boron layer as diffusion barrier for pure aluminium

Downscaling of Al/Si-gate MOSFETs with Self-Aligned Laser Annealed Source/Drain Junctions

Optimizing chemical mechanical polishing process in 3D-IC