39 records found
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Towards the integration of carbon nanotubes as vias in monolithic three-dimensional integrated circuits
Aluminum-induced iso-epitaxy of silicon for low-temperature fabrication of centimeter-large p+n junctions
Integrating low-temperature carbon nanotubes as vertical interconnects in Si technology
VUV/low-energy electron Si photodiodes with postmetal 400°C PureB deposition
Epitaxial growth of large-area p+n diodes at 400 ºC by aluminum-induced crystallization
Low-temperature bottom-up integration of carbon nanotubes for vertical interconnects in monolithic 3D integrated circuits
Electrical characterization of carbon nanotube vertical interconnects with different lengths and widths
Integrating carbon nanotubes as vias in a monolithic 3DIC process
Electrical characterisation of low temperature aligned carbon nanotubes for vertical interconnects
Low-complexity full-melt laser-anneal process for fabrication of low-leakage implanted ultrashallow junctions
Integration of MOSFETs with SiGe dots as stressor material
Integrating low temperature aligned carbon nanotubes as vertical interconnects in Si technology
n-Channel MOSFETs fabricated on SiGe dots for strain-enhanced mobility
Excimer laser crystallization of thick a-Si for photodiode and solar cell applications
MOSFETS on self assembled SiGe dots with strain-enhanced mobility
Thermal budget considerations for excimer laser annealing of implanted dopants
High performance single-grain Ge TFTs without seed substrate
Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits
Strained single grain silicon n- and p- channel thin-film transistors by excimer laser
N-channel MOSFETS fabricated on self assembled SiGe dots for strain-enhanced moblity