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Journal article (5)

5 records found

1

Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing

Journal article (2010) - S. Dobrovolskiy (author) , AE Yakshin (author) , F. Tichelaar (author) , J Verhoeven (author) , E Louis (author) , F Bijkerk (author)

Interface roughness in Mo/Si multilayers

Journal article (2006) - I Nedelcu (author) , RWE van de Kruijs (author) , AE Yakshin (author) , F.D. Tichelaar (author) , E Zoethout (author) , E Louis (author) , H Enkisch (author) , S Muellender (author) , F Bijkerk (author)

Fabrication and analysis of Exteme Ultra-violet reflection masks with patterned W/C absorber bilayers

Journal article (1997) - HJ Voorma (author) , E Louis (author) , J Friedrich (author) , NB Koster (author) , LA Smaenok (author) , F Bijkerk (author) , T Zijlstra (author) , LEM de Groot (author) , EWJM van der Drift (author) , BAC Rousseeuw (author) , J Romijn (author)

Extreme UV Lithography: Development of a laser plasma source and multilayer reflective optics

Journal article (1996) - F Bijkerk (author) , LA Shmaenol (author) , T Zijlstra (author) , E Louis (author) , HJ Voorma (author) , NB Koster (author) , FA van Goor (author) , J van Spijker (author) , E.W.J.M. van der Drift (author) , J Romijn (author) , BAC Rousseeuw (author)