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LEM de Groot

Journal article (2)

2 records found

1

Fabrication of a novel scanning probe device for quantitative nanotribology.

Journal article (2000) - T Zijlstra (author) , JA Heimberg (author) , E.W.J.M. van der Drift (author) , D Glastra van Loon (author) , M Dienwiebel (author) , LEM de Groot (author) , JWM Frenken (author)

Fabrication and analysis of Exteme Ultra-violet reflection masks with patterned W/C absorber bilayers

Journal article (1997) - HJ Voorma (author) , E Louis (author) , J Friedrich (author) , NB Koster (author) , LA Smaenok (author) , F Bijkerk (author) , T Zijlstra (author) , LEM de Groot (author) , EWJM van der Drift (author) , BAC Rousseeuw (author) , J Romijn (author)