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BJ Kampherbeek
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7 records found
An experimental setup to test the MAPPER electron lithography concept.
Journal article -
BJ Kampherbeek
,
MJJ Wieland
,
A. Zuuk
,
P. Kruit
Field Emission Photocathode Arrray for multibeam electron lithography.
Journal article -
MJJ Wieland
,
BJ Kampherbeek
,
P Addessi
,
P. Kruit
Field emission photocathode array for high throughput lithography.
Conference paper -
AHV van Veen
,
BJ Kampherbeek
,
MJJ Wieland
,
P. Kruit
Resolution of the multiple aperture pixel by pixel enhancement of resolution electron lithography concept.
Journal article -
BJ Kampherbeek
,
MJJ Wieland
,
P. Kruit
An experimental setup to prove the MAPPER electron lithography concept.
Conference paper -
BJ Kampherbeek
,
MJJ Wieland
,
P. Kruit
An experimental setup to proof the MAPPER electron lithography concept.
Conference paper -
BJ Kampherbeek
,
MJJ Wieland
,
P. Kruit
An experimental setup to test the Mapper electron lithography concept.
Conference paper -
BJ Kampherbeek
,
MJJ Wieland
,
A. Zuuk
,
P. Kruit