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Journal article (1)

1 records found

1

Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Journal article (2014) - RW Herfst (author) , W Klop (author) , M Eschen (author) , TC van den Dool (author) , NB Koster (author) , H Sadeghian Marnani (author)