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AG
A Goodyear
Academic Work (2)
Conference paper (1)
Journal article (1)
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Pattern transfer into silicon using sub-10 nm masks made by electron beam induced deposition
Conference paper (2015) -
M. Scotuzzi (author)
,
M.J. Kamerbeek (author)
,
A Goodyear (author)
,
M Cooke (author)
,
C.W. Hagen (author)
Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition
Journal article (2015) -
M. Scotuzzi (author)
,
M.J. Kamerbeek (author)
,
A Goodyear (author)
,
M Cooke (author)
,
C.W. Hagen (author)
