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DL Williamson
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2 records found
Material structure of microcrystalline silicon deposited with an expanding thermal plasma
Conference paper -
C Smit
,
DL Williamson
,
MCM van de Sanden
,
R.A.C.M.M. van Swaaij
High-rate deposition of microcrystalline silicon with an expanding thermal plasma
Journal article -
C Smit
,
A Klaver
,
BA Korevaar
,
AMHN Petit
,
DL Williamson
,
R.A.C.M.M. van Swaaij
,
MCM van de Sanden