6 records found
1
Lorentz motor with stationary magnets and coils applied in a 6-DOF contactless motion stage
A novel long stroke planar magnetic bearing configuration (niet eerder opgenomen)
A novel low dissipation long stroke planar magnetic suspension and propulsion stage (neit eerder opgenomen)
A novel long stroke planar magnetic bearing actuator (niet eerder opgenomen)
A Piezo-driven TEM-stage with subnanometer position stability
A Piezo-driven TEM-stage with subnanometer position stability Proceedings American Society for Precision Engineering