JB

J Beijer

6 records found

Authored

Finite thickness influence on spherical and conical indentation on viscoelastic thin polymer film

Prediction of thermo-mechanical integrity of wafer backend processes

Mechanical characterization and modeling of low-dielectric-constant SiLK films using nano-indentation: time- and temperature-effects

Influence of visco-elasticity of low-k dielectrics on thermo-mechanical behavior of dual damascene process
Conference paper (2003) - V Gonda, GQ Zhang, Jurriaan Den Toonder, J Beijer, L.J. Ernst

Finite thickness influence on spherical and conical indentation on viscoelastic thin polymer film
Conference paper (2003) - V Gonda, Jurriaan Den Toonder, J Beijer, GQ Zhang, L.J. Ernst

Prediction of thermo-mechanical integrity of wafer backend processes