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RH
RW Herfst
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Authored
4 records found
Parallel scanning probe microscope comes of age
Abstract -
H. Sadeghian Marnani
,
TC van den Dool
,
WE Crowcombe
,
RW Herfst
,
J Winters
,
GFIJ Kramer
,
NB Koster
High-throughput parallel SPM for metrology, defect, and mask inspection
Conference paper -
H. Sadeghian Marnani
,
RW Herfst
,
TC van den Dool
,
WE Crowcombe
,
J Winters
,
GFIJ Kramer
Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems
Journal article -
RW Herfst
,
W Klop
,
M Eschen
,
TC van den Dool
,
NB Koster
,
H. Sadeghian Marnani
Parallel, miniaturized scanning probe microscope for defect inspection and review
Conference paper -
H. Sadeghian Marnani
,
TC van den Dool
,
WE Crowcombe
,
RW Herfst
,
J Winters
,
GFIJ Kramer
,
NB Koster