RW Herfst | TU Delft Repository

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RW Herfst

Abstract (1)

Conference paper (2)

Journal article (1)

4 records found

1

Parallel scanning probe microscope comes of age

Abstract (2014) - Hamed Sadeghian Marnani (author) , TC van den Dool (author) , WE Crowcombe (author) , RW Herfst (author) , J Winters (author) , GFIJ Kramer (author) , NB Koster (author)

Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Journal article (2014) - RW Herfst (author) , W Klop (author) , M Eschen (author) , TC van den Dool (author) , NB Koster (author) , H Sadeghian Marnani (author)

Parallel, miniaturized scanning probe microscope for defect inspection and review

Conference paper (2014) - Hamed Sadeghian Marnani (author) , TC van den Dool (author) , WE Crowcombe (author) , RW Herfst (author) , J Winters (author) , GFIJ Kramer (author) , NB Koster (author)

High-throughput parallel SPM for metrology, defect, and mask inspection

Conference paper (2014) - H Sadeghian Marnani (author) , RW Herfst (author) , TC van den Dool (author) , WE Crowcombe (author) , J Winters (author) , GFIJ Kramer (author)