A Bagolini | TU Delft Repository

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A Bagolini

Conference paper (1)

Journal article (1)

2 records found

1

Polymide sacrificial layer for an all-dry post-process surface micromachining module

Conference paper (2003) - HTM Pham (author) , A Bagolini (author) , C.R. de Boer (author) , J.M.W. Laros (author) , L.S. Pakula (author) , P.J. French (author) , Pasqualina M Sarro (author)

Polyimide sacrificial layer and novel materials for post-processing surface micromachining

Journal article (2002) - A Bagolini (author) , L.S. Pakula (author) , T.L.M. Scholtes (author) , HTM Pham (author) , P.J. French (author) , Pasqualina M Sarro (author)