Electron optics of skewed micro-Einzel lenses

Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis

Diffraction patterns of artificial 2-d crystals synthesized in sItu in an environmental scanning transmission electron microscope

Multibeam Electron Source using MEMS Electron Optical Components

Multi Beam electron source for nanofabrication using electron beam induced deposition

One nanometer structure fabrication using electron beam induced deposition

Aberration model of a multi beam scanning microscope for electron beam-induced deposition

Design Approach for a Multi Beam Electron Beam Induced Deposition System

Nanolithography in an environmental scanning transmission electron microscope

Multibeam electron source for nanofrabrication and multibeam imaging

Development of a multi electron beam source for sub-10 nm electron beam induced deposition

Resolution limits in electron-beam-induced deposition

Approaching the resolution limit of nanometer-scale electron beam-induced deposition

Electron microlenses and microlens arrays

Electron beam induced deposition and in-situ inspection of sub-10 nm structures