Electron optics of skewed micro-Einzel lenses

Multi Beam electron source for nanofabrication using electron beam induced deposition

Multibeam Electron Source using MEMS Electron Optical Components

Aberration model of a multi beam scanning microscope for electron beam-induced deposition

Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis

One nanometer structure fabrication using electron beam induced deposition

Diffraction patterns of artificial 2-d crystals synthesized in sItu in an environmental scanning transmission electron microscope

Multibeam electron source for nanofrabrication and multibeam imaging

Approaching the resolution limit of nanometer-scale electron beam-induced deposition

Resolution limits in electron-beam-induced deposition

Design Approach for a Multi Beam Electron Beam Induced Deposition System

Nanolithography in an environmental scanning transmission electron microscope

Development of a multi electron beam source for sub-10 nm electron beam induced deposition

Electron microlenses and microlens arrays

Electron beam induced deposition and in-situ inspection of sub-10 nm structures