Micro-electro-mechanical systems (MEMS) are used in applications ranging from consumer electronics to medical diagnostics. Alternatively, optical sensors offer low-noise, remote read-out via optical fiber, and are insensitive to electromagnetic interference. We demonstrate micro-opto-mechanical sensors (MOMS) in siliconnitride photonic technology. Experimental results and design trade-offs of pressure, sound, and ultrasound sensors are reported. Transparency for visible light offers prospective applications in life sciences, such as photo-acoustics.@en

In recent years TNO has investigated and developed different innovative opto-mechanical designs to realize advanced spectrometers for space applications in a more compact and cost-effective manner. This offers multiple advantages: a compact instrument can be flown on a much smaller platform or as add-on on a larger platform; a low-cost instrument opens up the possibility to fly multiple instruments in a satellite constellation, improving both global coverage and temporal sampling (e.g. multiple overpasses per day to study diurnal processes); in this way a constellation of low-cost instruments may provide added value to the larger scientific and operational satellite missions (e.g. the Copernicus Sentinel missions); a small, lightweight spectrometer can easily be mounted on a small aircraft or high-altitude UAV (offering high spatial resolution).

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