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B Fodor

Conference paper (6)

Journal article (1)

7 records found

1

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author) , B Fodor (author) , T Lohner (author) , Paul Urbach (author) , B Bodermann (author) , M Fried (author) , E Agocs (author) , P Kozma (author) , J Nador (author) , N. Kumar (author) , J Endres (author) , G Juhasz (author) , C Major (author) , S.F. Pereira (author)

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Journal article (2015) - P. Petrik (author) , N Kumar (author) , M Fried (author) , B Fodor (author) , G Juhasz (author) , S.F. Pereira (author) , S Burger (author) , Paul Urbach (author)

art.nr. 15002

Optical Characterization of laterally and vertically structured oxides and semiconductors

Conference paper (2014) - P. Petrik (author) , N. Kumar (author) , E Agocs (author) , B Fodor (author) , S.F. Pereira (author) , T Lohner (author) , Mi Fried (author) , Paul Urbach (author)