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EJJ Neihof
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Authored
3 records found
Large Polycrystalline Silicon Grains Prepared by Excimer Laser Crystallization of Sputtered Amorphous Silicon Film with Process Temperature at 100C
Journal article -
M He
,
R. Ishihara
,
EJJ Neihof
,
Y van Andel
,
H. Schellevis
,
JW Metselaar
,
C.I.M. Beenakker
Preparation of large poly-Si grains by excimer laser crystallization of sputtered a-Si film with processing temperature of 100 °C
Conference paper -
M He
,
R. Ishihara
,
EJJ Neihof
,
Y van Andel
,
H. Schellevis
,
C.I.M. Beenakker
Preparation of large, location-controlled Si grains by excimer laser crystallization of ¿-Si film sputtered at 100 °C
Conference paper -
M He
,
EJJ Neihof
,
Y van Andel
,
H. Schellevis
,
R. Ishihara
,
JW Metselaar
,
C.I.M. Beenakker