EJJ Neihof | TU Delft Repository

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EJJ Neihof

Conference paper (2)

Journal article (1)

3 records found

1

Large Polycrystalline Silicon Grains Prepared by Excimer Laser Crystallization of Sputtered Amorphous Silicon Film with Process Temperature at 100C

Journal article (2007) - M He (author) , Ryoichi Ishihara (author) , EJJ Neihof (author) , Y van Andel (author) , H. Schellevis (author) , JW Metselaar (author) , Kees Beenakker (author)

Preparation of large, location-controlled Si grains by excimer laser crystallization of ¿-Si film sputtered at 100 °C

Conference paper (2006) - M He (author) , EJJ Neihof (author) , Y van Andel (author) , H. Schellevis (author) , Ryoichi Ishihara (author) , JW Metselaar (author) , Kees Beenakker (author)

Preparation of large poly-Si grains by excimer laser crystallization of sputtered a-Si film with processing temperature of 100 °C

Conference paper (2006) - M He (author) , R. Ishihara (author) , EJJ Neihof (author) , Y van Andel (author) , H Schellevis (author) , CIM Beenakker (author)