11 records found
1
Dry etching of SiC in inductively coupled Cl-2/Ar plasma
The etching of silicon carbide in inductively coupled SF6/O-2 plasma
Etch mechanism and etch-induced effects in the inductively coupled plasma etching of GaN
X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films
A study of reactive ion etching damage effects in GaN.
Inductively coupled plasma etching of GaN and its effect ton electrical characteristics.
A study of reactive ion etching damage effects in GaN
Improvement of contact resistances on plasma-exposed silicon carbide.
Effects of dry processing on the optical properties of GaN.
High resolution reactive ion etching of GaN and etch-induced effects.
Dry etching and induced damage
