We report on the development and demonstration of MHz frequency domain multiplexing (FDM) technology to readout arrays of cryogenic transition edge sensor (TES) x-ray microcalorimeters. In our FDM scheme, TESs are AC biased at different resonant frequencies in the low MHz range through an array of high-Q LC resonators. The current signals of all TESs are summed at superconducting quantum interference devices (SQUIDs). We have demonstrated multiplexing for a readout of 31 pixels using room temperature electronics, high-Q LC filters, and TES arrays developed at SRON, and SQUID arrays from VTT. We repeated this on a second setup with 37 pixels. The summed x-ray spectral resolutions @ 5.9 keV are Δ E 31 pix MUX = 2.14 ± 0.03 eV and Δ E 37 pix MUX = 2.23 ± 0.03 eV. The demonstrated results are comparable with other multiplexing approaches. There is potential to further improve the spectral resolution, to increase the number of multiplexed TESs, and to open up applications for TES x-ray microcalorimeters.

We are developing a kilo-pixels Ti/Au TES array as a backup option for Athena X-IFU. Here we report on single-pixel performance of a 32 × 32 array operated in a Frequency Division Multiplexing (FDM) readout system, with bias frequencies in the range 1-5 MHz. We have tested the pixels response at several photon energies, by means of a 55Fe radioactive source (emitting Mn-Kα at 5.9 keV) and a Modulated X-ray Source (MXS, providing Cr-Kα at 5.4 keV and Cu-Kα at 8.0 keV). First, we report the procedure used to perform the detector energy scale calibration, usually achieving a calibration accuracy better than ∼0.5 eV in the 5.4-8.9 keV energy range. Then, we present the measured energy resolution at the different energies (best single pixel performance: ΔEFWHM = 2.40 ± 0.09 eV @ 5.4 keV; 2.53 ± 0.10 eV @ 5.9 keV; 2.78 ± 0.16 eV @ 8.0 keV), investigating also the performance dependency from the pixel bias frequency and the count rate. Thanks to long background measurements (∼1 d), we finally detected also the Al-Kα line at 1.5 keV, generated by fluorescence inside the experimental setup. We analyzed this line to obtain a first assessment of the single-pixel performance also at low energy (ΔEFWHM = 1.91 eV ± 0.21 eV @ 1.5 keV), and to evaluate the linearity of the detector response in a large energy band (1.5-8.9 keV).