Spectral measurement with a linear variable filter using a LMS algorithm

CMOS compatible LVOF based visible microspectrometer

An UV linear variable optical filter based micro spectrometer

Optical microspectrometers using imaging diffraction gratings

Spectral measurement using IC compatible linear variable optical filter

Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer

IC-compatible fabrication of linear variable optical filters for micro-spectrometer

Vertically tapered layers for optical applications fabricated using resist reflow

Interference filter based IR absorber for MEMS thermopile array

Characterization of thermal cross-talk in a MEMS-based thermopile detector array

Microspectrometer with a concave grating fabricated in a MEMS technology

Study of thermal cross-talk in micromachined thermopile based infrared detector arrays

Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays

Cross-talk characterization of thermal detector array

A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer

IC-compatible microspectrometer using a planar imaging diffraction grating

High-resolution microspectrometer with an aberration-correcting planar grating

Optical microspectrometer with planar grating and external spherical

Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

Concave diffraction gratings fabricated with planar lithography