33 records found
1
An UV linear variable optical filter based micro spectrometer
Spectral measurement using IC compatible linear variable optical filter
Spectral measurement with a linear variable filter using a LMS algorithm
Optical microspectrometers using imaging diffraction gratings
CMOS compatible LVOF based visible microspectrometer
Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer
Study of thermal cross-talk in micromachined thermopile based infrared detector arrays
Vertically tapered layers for optical applications fabricated using resist reflow
Characterization of thermal cross-talk in a MEMS-based thermopile detector array
Microspectrometer with a concave grating fabricated in a MEMS technology
Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays
IC-compatible fabrication of linear variable optical filters for micro-spectrometer
Interference filter based IR absorber for MEMS thermopile array
Planar MEMS-compatible microspectrograph
Cross-talk characterization of thermal detector array
Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer
Characterization of thermal cross-talk in a thermopile detector
IC-compatible microspectrometer using a planar imaging diffraction grating
Optical microspectrometer with planar grating and external spherical
Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph