We report a monolithic THz planar Fabry-Perot cavity fabricated with wafer bonding and provided with metallic mirrors with subwavelength apertures. We demonstrate its coupling to the cyclotron resonance of a high-mobility, two-dimensional electron gas.Qfactors up to 89 are observed for the first mode at ≃300 GHz, with cooperativity C= 56.4 and a normalized coupling ratio Ωωin the first mode of up to 17.5% and the third mode of up to 6.4%.

We fabricate high temperature superconducting metasurfaces from yttrium-barium-copper oxide (YBCO) films via focused ion beam milling. The design of the complementary split ring resonators yields a high quality factor (up to Q = 31) resonance, which is fully switchable when exploiting the transition from the superconducting to normal conducting state, which is achieved by heating the sample above the critical temperature. Meanwhile, the resonance is continuously visible and frequency stable under the action of a magnetic field, up to B = 9 T. This makes it an ideal candidate for light-matter coupling experiments with magnetic field tunable Landau level transitions. We present two techniques to bring the metasurface in close vicinity of a 2D electron gas in an AlGaAs/GaAs QW without direct deposition, and we achieve a normalized vacuum Rabi frequency of ω_R/λ_cyc = 24%.