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B Bodermann

Conference paper (1)

Journal article (1)

2 records found

1

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P Petrik (author) , B Fodor (author) , T Lohner (author) , Paul Urbach (author) , B Bodermann (author) , M Fried (author) , E Agocs (author) , P Kozma (author) , J Nador (author) , N Kumar (author) , J Endres (author) , G Juhasz (author) , C Major (author) , S.F. Pereira (author)

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Journal article (2014) - J Endres (author) , N Kumar (author) , P Petrik (author) , S Heidenreich (author) , Silvania F. Pereira (author) , HP Urbach (author) , B Bodermann (author)