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A Glazer
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A novel Selected Area Laser Assisted (SALA) system for crystallization and doping processes in low-temperature poly-Si thin-film transistors
Journal article -
R. Ishihara
,
A Glazer
,
JW Metselaar
,
C.I.M. Beenakker
,
S Stolyarova
,
Y Nemirovsky
,
Y Raab
,
P Rusian
,
M Dorfan
,
B Lavi
,
I Leizerson
,
A Kishinevsky
,
Y van Andel
,
X. Cao