Electron optics of skewed micro-Einzel lenses

Integrated Multi-electron-beam blanker array for sub-10-nm electron beam induced deposition

Multi Beam electron source for nanofabrication using electron beam induced deposition

Aberration model of a multi beam scanning microscope for electron beam-induced deposition

Multibeam Electron Source using MEMS Electron Optical Components

Multibeam electron source for nanofrabrication and multibeam imaging

Design Approach for a Multi Beam Electron Beam Induced Deposition System

Development of a multi electron beam source for sub-10 nm electron beam induced deposition

Electron microlenses and microlens arrays

Electron beam induced deposition and in-situ inspection of sub-10 nm structures