-
document
-
Sun, J. (author), Sokolovskij, R. (author), Iervolino, E. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
We developed an AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO<sub>3</sub>) nano-film modified gate for nitrogen dioxide (NO<sub>2</sub>) detection. The device has a suspended circular membrane structure and an integrated micro-heater. The thermal characteristic of the Platinum (Pt) micro-heater and the...
journal article 2019
Source URL (retrieved on 2024-06-10 03:31): https://repository.tudelft.nl/islandora/search/%20?amp%3Bamp%3Bf%5B0%5D=mods_genre_s%3A%22doctoral%5C%20thesis%22&collection=research&f%5B0%5D=mods_name_personal_author_namePart_family_ss%3A%22Liu%22&f%5B1%5D=mods_name_personal_author_namePart_family_ss%3A%22Sarro%22&f%5B2%5D=mods_subject_topic_ss%3A%22HEMT%22