Wolffenbuttel, R.F. (author), Winship, Declan (author), Bilby, David (author), Visser, Jaco (author), Qin, Yutao (author), Gianchandani, Yogesh (author) Fabry–Perot interferometers (FPIs), comprising foundry-compatible dielectric thin films on sapphire wafer substrates, were investigated for possible use in chemical sensing. Specifically, structures comprising two vertically stacked distributed Bragg reflectors (DBRs), with the lower DBR between a sapphire substrate and a silicon-oxide (SiO2)...
journal article 2024