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Vendelbo, S.B. (author), Creemer, J.F. (author), Helveg, S. (author), Morana, B. (author), Mele, L. (author), Molenbroek, A.M. (author), Sarro, P.M. (author), Zandbergen, H.W. (author), Kooyman, P.J. (author)
Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.
journal article 2011
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Mele, L. (author), Rossi, T. (author), Riccio, M. (author), Iervolino, E. (author), Santagata, F. (author), Irace, A. (author), Breglio, G. (author), Creemer, J.F. (author), Sarro, P.M. (author)
This paper presents a microhotplate working up to 1200 °C with improved temperature uniformity by optimizing the geometry of the thin-film resistor. By varying the linewidth of meandering resistive tracks, heat is generated in such a way to have more homogenous temperature distribution. The microhotplates are fabricated using molybdenum as...
journal article 2011
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Mele, L. (author), Santagata, F. (author), Panraud, G. (author), Morana, B. (author), Tichelaar, F.D. (author), Creemer, J.F. (author), Sarro, P.M. (author)
This paper presents a new process for the fabrication of MEMS-based nanoreactors for in situ atomic-scale imaging of nanoparticles under relevant industrial conditions. The fabrication of the device is completed fully at wafer level in an ISO 5 clean room and it is based on silicon fusion bonding and thin film encapsulation for sealed lateral...
journal article 2010
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