Rocha, L.A. (author), Mol, L. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author), Machado da Silva, J. (author) A test technique for capacitive MEMS accelerometers and electrostatic microactuators, based on the measurement of pull-in voltages and resonance frequency, is described. Using this combination of measurements, one can estimate process-induced variations in the device layout dimensions as well as deviations from nominal value in material...
journal article 2008