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document
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Zijlstra, T. (author), Lodewijk, C.F.J. (author), Vercruyssen, N. (author), Tichelaar, F.D. (author), Loudkov, D.N. (author), Klapwijk, T.M. (author)
High critical current-density (10?to?420?kA/cm2) superconductor-insulator-superconductor tunnel junctions with aluminum nitride barriers have been realized using a remote nitrogen plasma from an inductively coupled plasma source operated in a pressure range of 10?3–10?1?mbar. We find a much better reproducibility and control compared to previous...
journal article 2007
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