-
document
-
Van Oven, J.C. (author), Berwald, F. (author), Berggren, K.K. (author), Kruit, P. (author), Hagen, C.W. (author)
This paper demonstrates electron-beam-induced deposition of few-nm-width dense features on bulk samples by using a scanning electron-beam lithography system. To optimize the resultant features, three steps were taken: (1) features were exposed in a repetitive sequence, so as to build up the deposited features gradually across the entire pattern,...
journal article 2011
Source URL (retrieved on 2024-05-25 23:41): https://repository.tudelft.nl/islandora/search/%20?amp%3Bamp%3Bf%5B0%5D=mods_subject_topic_ss%3A%22herstructurering%22&%3Bamp%3Bf%5B1%5D=mods_subject_topic_ss%3A%22hoogbouw%22&%3Bamp%3Bsort=mods_genre_s%20asc&%3Bf%5B0%5D=mods_name_personal_author_namePart_family_ss%3A%22Pronk%22&collection=research&f%5B0%5D=mods_genre_s%3A%22journal%5C%20article%22&f%5B1%5D=mods_subject_topic_ss%3A%22elemental%5C%20semiconductors%22&f%5B2%5D=mods_name_personal_author_namePart_family_ss%3A%22Berwald%22&f%5B3%5D=mods_subject_topic_ss%3A%22silicon%22