-
document
-
Emadi, A. (author), Grabarnik, S. (author), Wu, H. (author), De Graaf, G. (author), Hedsten, K. (author), Enoksson, P. (author), Correia, J.H. (author), Wolffenbuttel, R.F. (author)
This paper reports on the functional and spectral characterization of a microspectrometer based on a CMOS detector array covered by an IC-Compatible Linear Variable Optical Filter (LVOF). The Fabry-Perot LVOF is composed of 15 dielectric layers with a tapered middle cavity layer, which has been fabricated in an IC-Compatible process using resist...
conference paper 2010
Source URL (retrieved on 2024-04-28 11:27): https://repository.tudelft.nl/islandora/search/%20?amp%3Bcollection=research&%3Bamp%3Bf%5B0%5D=mods_genre_s%3A%22report%22&%3Bamp%3Bf%5B1%5D=mods_subject_topic_ss%3A%22waterkwaliteit%22&%3Bamp%3Bsort=mods_originInfo_dateSort_dt%20asc&%3Bf%5B0%5D=RELS_EXT_isMemberOfCollection_uri_s%3A%22info%5C%3Afedora%5C/collection%5C%3Air%22&f%5B0%5D=mods_name_personal_author_namePart_family_ss%3A%22Wu%22&f%5B1%5D=mods_name_personal_author_namePart_family_ss%3A%22Grabarnik%22&f%5B2%5D=mods_subject_topic_ss%3A%22tapered%5C%20Fabry%5C-Perot%22